Silicon tetrafluoride
(SiF4)
Other Names:
Silane, tetrafluoro-; Silicon fluoride (SiF4); Tetrafluorosilane; Silicon fluoride; UN 1859
| Analyte | Detection Limit(s) DL(s) (ppm) |
Method/Technique(s) Method/ Technique(s) |
|---|---|---|
|
Argon Argon (Ar) |
1 1 ppm |
GC–PDID |
|
Carbon dioxide Carbon dioxide (CO2) |
na na |
FTIR |
|
Carbon monoxide Carbon monoxide (CO) |
1 1 ppm |
GC–PDID |
|
Carbon tetrafluoride Carbon tetrafluoride (CF4) |
1 1 ppm |
GC–PDID |
|
Hydrogen Hydrogen (H2) |
1 1 ppm |
GC–PDID |
|
Hydrogen chloride Hydrogen chloride (HCl) |
na na |
FTIR |
|
Hydrogen fluoride Hydrogen fluoride (HF) |
na na |
FTIR |
| Metals |
ppb level ppb level |
ICP–MS |
|
Methane Methane (CH4) |
na na |
FTIR |
|
Nitrogen Nitrogen (N2) |
1 1 ppm |
GC–PDID |
|
Oxygen Oxygen (O2) |
1 1 ppm |
GC–PDID |
|
Sulfur dioxide Sulfur dioxide (SO2) |
na na |
FTIR |
|
Sulfur hexafluoride Sulfur hexafluoride (F6S) |
na na |
FTIR |
|
Water vapor Water vapor (H2O) |
0.5 – 2.0 0.5 – 2.0 ppm |
FTIR |
Please keep in mind that these detection limits are only a guide. Many projects are highly unique and we recommend discussing your project with us over the phone. When you're ready to send your sample, visit Getting Started for important information.
