Disilane
(Si2H6)
Other Names:
None
| Analyte | Detection Limit(s) DL(s) (ppm) |
Method/Technique(s) Method/ Technique(s) |
|---|---|---|
|
i-Tetrasilane i-Tetrasilane (Si4ClF9) |
|
GC–MS, GC–ICP–MS |
|
Argon Argon (Ar) |
0.1 0.1 ppm |
GC–PDID |
|
Carbon dioxide Carbon dioxide (CO2) |
0.05 0.05 ppm |
GC–PDID |
|
Carbon monoxide Carbon monoxide (CO) |
0.05 0.05 ppm |
GC–PDID |
|
Hydrocarbons Hydrocarbons (C3 – C5) |
0.2 0.2 ppm |
GC–FID |
|
Hydrogen Hydrogen (H2) |
0.05 0.05 ppm |
GC–PDID |
|
Methane Methane (CH4) |
0.05 0.05 ppm |
GC–PDID |
|
Nitrogen Nitrogen (N2) |
0.1 0.1 ppm |
GC–PDID |
|
Oxygen Oxygen (O2) |
0.1 0.1 ppm |
GC–PDID |
|
Silane Silane (SiH4) |
|
GC–MS, GC–ICP–MS |
|
Tetrasilane Tetrasilane (Si4H10) |
|
GC–MS, GC–ICP–MS |
|
Trisilane Trisilane (Si3H8) |
|
GC–MS, GC–ICP–MS |
|
Water vapor Water vapor (H2O) |
1–2 1–2 ppm |
FTIR |
Please keep in mind that these detection limits are only a guide. Many projects are highly unique and we recommend discussing your project with us over the phone. When you're ready to send your sample, visit Getting Started for important information.
