Dichlorosilane

(SiCl2H2)

 
Analyte
Detection Limit(s)
DL(s)
(ppm)
Method/Technique(s)
Method/
Technique(s)
Argon
Argon (Ar)
0.1
0.1 ppm
GC–PDID
Carbon dioxide
Carbon dioxide (CO2)
0.05
0.05 ppm
GC–PDID
Carbon monoxide
Carbon monoxide (CO)
0.05
0.05 ppm
GC–PDID
Carbon tetrafluoride
Carbon tetrafluoride (CF4)
0.05
0.05 ppm
GC–PDID
Chlorosiloxanes
10
10 ppm
GC/MS, GC–ICP–MS
Hydrocarbons
Hydrocarbons (C2 – C6)
0.1
0.1 ppm
GC–FID
Hydrogen
Hydrogen (H2)
0.05
0.05 ppm
GC–PDID
Hydrogen chloride
Hydrogen chloride (HCl)
0.5
0.5 ppm
FTIR
Hydrogen fluoride
Hydrogen fluoride (HF)
0.2
0.2 ppm
FTIR
Methane
Methane (CH4)
0.05
0.05 ppm
GC–PDID
Monochlorosilane
Monochlorosilane (SiH3Cl)
10
10 ppm
GC/MS, GC–ICP–MS
Nitrogen
Nitrogen (N2)
0.1
0.1 ppm
GC–PDID
Oxygen
Oxygen (O2)
0.1
0.1 ppm
GC–PDID
Silane
Silane (SiH4)
10
10 ppm
GC/MS, GC–ICP–MS
Silicon tetrachloride
Silicon tetrachloride (SiCl4)
10
10 ppm
GC/MS, GC–ICP–MS
Trichlorosilane
Trichlorosilane (SiHCl3)
10
10 ppm
GC/MS, GC–ICP–MS
Water vapor
Water vapor (H2O)
1–2
1–2 ppm
FTIR

Please keep in mind that these detection limits are only a guide. Many projects are highly unique and we recommend discussing your project with us over the phone. When you're ready to send your sample, visit Getting Started for important information.